Nanofabrication : principles to laboratory practice

Authors :Sarangan, Andrew
Edition :
Year :2017
Description :

Features

• Develops a fundamental understanding of commonly used device fabrication processes and tools in an R&D environment
• Presents information based on hands-on experience with the cleanroom process development
• Provides practical tips and strategies for development
• Includes basic theory of electromagnetics and electrochemistry

Summary

This book is designed to introduce typical cleanroom processes, techniques, and their fundamental principles. It is written for the practicing scientist or engineer, with a focus on being able to transition the information from the book to the laboratory. Basic theory such as electromagnetics and electrochemistry is described in as much depth as necessary to understand and explain the current practice and their limitations. Examples from various areas of interest will be covered, such as the fabrication of photonic devices including photo detectors, waveguides, and optical coatings, which are not commonly found in other fabrication texts.

 Content: 

• Chapter 1. Introduction to micro- and nanofabrication --
• Chapter 2. Fundamentals of vacuum and plasma technology --
• Chapter 3. Physical and chemical vapor deposition --
• Chapter 4. Thin-film optics --
• Chapter 5. Substrate materials --
• Chapter 6. Lithography --
• Chapter 7. Wet chemical and plasma etching --
• Chapter 8. Doping, surface modifications, and metal contacts --
• Chapter 9. Metrology for device fabrication.

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